Kinetic inductance in superconducting CoSi2 coplanar microwave transmission lines

Ekaterina Mukhanova; Weijun Zeng; Elica Anne Heredia; Chun Wei Wu; Ilari Lilja; Juhn Jong Lin; Sheng Shiuan Yeh; Pertti Hakonen

doi:10.1063/5.0195106

Kinetic inductance in superconducting CoSi₂ coplanar microwave transmission lines

Ekaterina Mukhanova, Weijun Zeng, Elica Anne Heredia, Chun Wei Wu, Ilari Lilja, Juhn Jong Lin, Sheng Shiuan Yeh^*, Pertti Hakonen^*

^*Corresponding author for this work

National Yang Ming Chiao Tung University

Research output: Contribution to journal › Article › Scientific › peer-review

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Abstract

We have looked into cobalt disilicide (CoSi₂) as a potential building block for superconducting quantum circuits. In order to achieve this, we annealed a thin layer of Co to create microwave cavities with thickness of d = 10-105 nm from CoSi₂ embedded in the silicon substrate. The cavity properties were measured as a function of temperature and power. In the films measuring 10 and 25 nm, we find a significant kinetic inductance L_K with a non-BCS power-law variation δL_K ∝ T^4.3±0.2 at low temperatures. The quality factor of the studied microwave resonances varied from 3 × 10³ (d = 10 nm) to ∼5 × 10⁴ (d = 105 nm) and increased as d(A − log d) with thickness, with two-level systems having very little effect. The power dependence of kinetic inductance was analyzed in terms of heat flow due to electron-phonon coupling, which was found to be stronger than estimated for heat relaxation by regular quasiparticles.

Original language	English
Article number	041115
Pages (from-to)	1-7
Number of pages	7
Journal	APL Materials
Volume	12
Issue number	4
DOIs	https://doi.org/10.1063/5.0195106
Publication status	Published - 1 Apr 2024
MoE publication type	A1 Journal article-refereed

Funding

We thank Tero Heikkil\u00E4, Alexander Zyuzin, Teun Klapwijk, Manohar Kumar, P\u00E4ivi T\u00F6rm\u00E4, and Shao-Pin Chiu for fruitful discussions and Pei-Ling Wu and Shouray Kumar Sahu for experimental assistance. This work was supported by the Academy of Finland (AF) Project Nos. 341913 (EFT), 312295 and 352926 (CoE, Quantum Technology Finland), and Taiwan\u2013Finland AF mobility Grant No. 341884 (S. S. Yeh). The research leading to these results received funding from the European Union\u2019s Horizon 2020 Research and Innovation Programme, under Grant No. 824109 (EMP). Our work was also supported by funding from the Jane and Aatos Erkko Foundation and the Keele Foundation (SuperC project). This experimental work benefited from the Aalto University OtaNano/LTL infrastructure. J. J. Lin acknowledges the support from the National Science and Technology Council (NSTC) of Taiwan through Grant Nos. 110-2112-M-A49-015 and 111-2119-M-007-005. S. S. Yeh acknowledges the support from the NSTC of Taiwan through Grant No. 110-2112-M-A49-033-MY3 and the support from the Taiwan Ministry of Education through the Higher Education Sprout Project of the NYCU. We thank Tero Heikkil\u00E4, Alexander Zyuzin, Teun Klapwijk, Manohar Kumar, P\u00E4ivi T\u00F6rm\u00E4, and Shao-Pin Chiu for fruitful discussions and Pei-Ling Wu and Shouray Kumar Sahu for experimental assistance. This work was supported by the Academy of Finland (AF) Project Nos. 341913 (EFT), 312295 and 352926 (CoE, Quantum Technology Finland), and Taiwan-Finland AF mobility Grant No. 341884 (S. S. Yeh). The research leading to these results received funding from the European Union\u2019s Horizon 2020 Research and Innovation Programme, under Grant No. 824109 (EMP). Our work was also supported by funding from the Jane and Aatos Erkko Foundation and the Keele Foundation (SuperC project). This experimental work benefited from the Aalto University OtaNano/LTL infrastructure. J. J. Lin acknowledges the support from the National Science and Technology Council (NSTC) of Taiwan through Grant Nos. 110-2112-M-A49-015 and 111-2119-M-007-005. S. S. Yeh acknowledges the support from the NSTC of Taiwan through Grant No. 110-2112-M-A49-033-MY3 and the support from the Taiwan Ministry of Education through the Higher Education Sprout Project of the NYCU.

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Kinetic inductance in superconducting CoSi2 coplanar microwave transmission linesFinal published version, 6.19 MBLicence: CC BY

Cite this

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title = "Kinetic inductance in superconducting CoSi2 coplanar microwave transmission lines",

abstract = "We have looked into cobalt disilicide (CoSi2) as a potential building block for superconducting quantum circuits. In order to achieve this, we annealed a thin layer of Co to create microwave cavities with thickness of d = 10-105 nm from CoSi2 embedded in the silicon substrate. The cavity properties were measured as a function of temperature and power. In the films measuring 10 and 25 nm, we find a significant kinetic inductance LK with a non-BCS power-law variation δLK ∝ T4.3±0.2 at low temperatures. The quality factor of the studied microwave resonances varied from 3 × 103 (d = 10 nm) to ∼5 × 104 (d = 105 nm) and increased as d(A − log d) with thickness, with two-level systems having very little effect. The power dependence of kinetic inductance was analyzed in terms of heat flow due to electron-phonon coupling, which was found to be stronger than estimated for heat relaxation by regular quasiparticles.",

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AU - Mukhanova, Ekaterina

AU - Zeng, Weijun

AU - Heredia, Elica Anne

AU - Wu, Chun Wei

AU - Lilja, Ilari

AU - Lin, Juhn Jong

AU - Yeh, Sheng Shiuan

AU - Hakonen, Pertti

PY - 2024/4/1

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N2 - We have looked into cobalt disilicide (CoSi2) as a potential building block for superconducting quantum circuits. In order to achieve this, we annealed a thin layer of Co to create microwave cavities with thickness of d = 10-105 nm from CoSi2 embedded in the silicon substrate. The cavity properties were measured as a function of temperature and power. In the films measuring 10 and 25 nm, we find a significant kinetic inductance LK with a non-BCS power-law variation δLK ∝ T4.3±0.2 at low temperatures. The quality factor of the studied microwave resonances varied from 3 × 103 (d = 10 nm) to ∼5 × 104 (d = 105 nm) and increased as d(A − log d) with thickness, with two-level systems having very little effect. The power dependence of kinetic inductance was analyzed in terms of heat flow due to electron-phonon coupling, which was found to be stronger than estimated for heat relaxation by regular quasiparticles.

AB - We have looked into cobalt disilicide (CoSi2) as a potential building block for superconducting quantum circuits. In order to achieve this, we annealed a thin layer of Co to create microwave cavities with thickness of d = 10-105 nm from CoSi2 embedded in the silicon substrate. The cavity properties were measured as a function of temperature and power. In the films measuring 10 and 25 nm, we find a significant kinetic inductance LK with a non-BCS power-law variation δLK ∝ T4.3±0.2 at low temperatures. The quality factor of the studied microwave resonances varied from 3 × 103 (d = 10 nm) to ∼5 × 104 (d = 105 nm) and increased as d(A − log d) with thickness, with two-level systems having very little effect. The power dependence of kinetic inductance was analyzed in terms of heat flow due to electron-phonon coupling, which was found to be stronger than estimated for heat relaxation by regular quasiparticles.

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Kinetic inductance in superconducting CoSi₂ coplanar microwave transmission lines

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