Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

  • Riikka L. Puurunen*
  • , Wilfried Vandervorst
  • , Wim F A Besling
  • , Olivier Richard
  • , Hugo Bender
  • , Thierry Conard
  • , Chao Zhao
  • , Annelies Delabie
  • , Matty Caymax
  • , Stefan De Gendt
  • , Marc Heyns
  • , Minna M. Viitanen
  • , Marco De Ridder
  • , Hidde H. Brongersma
  • , Yde Tamminga
  • , Thuy Dao
  • , Toon De Win
  • , Marcel Verheijen
  • , Monja Kaiser
  • , Marko Tuominen
    • *Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

154 Citations (Scopus)

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