Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

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Original languageEnglish
Pages (from-to)724-726
JournalPHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE
Volume209
Issue number4
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

    Research areas

  • gettering, iron, polycrystalline silicon, silicon-on-insulator

ID: 963345