Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

Marko Yli-Koski, Antti Haarahiltunen, Jouko Hintsala, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)724-726
JournalPHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE
Volume209
Issue number4
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Keywords

  • gettering
  • iron
  • polycrystalline silicon
  • silicon-on-insulator

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