Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • T. Ogawa
  • Y. Ezoe
  • T. Moriyama
  • I. Mitsuishi
  • T. Kakiuchi
  • T. Ohashi
  • K. K.Mitsuda
  • Matti Putkonen

Research units

Details

Original languageEnglish
Pages (from-to)5949-5956
JournalApplied Optics
Volume52
Issue numberxx
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

ID: 873540