IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi; V. Heikkinen; I. Kassamakov; J. Aaltonen; Tuomo Ylitalo; O. Saresoja; M. Berdova; S. Franssila; E. Haeggstrom

doi:10.1117/12.922105

IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, Tuomo Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Haeggstrom

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Optical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012
DOIs	https://doi.org/10.1117/12.922105
Publication status	Published - 2012
MoE publication type	A4 Article in a conference publication

Publication series

Name
ISSN (Print)	0277-786X

Keywords

3D imaging
IR
LED
MEMS
multilayer
non-destructive imaging
scanning white light interferometry
stitching

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10.1117/12.922105

http://dx.doi.org/10.1117/12.922105

Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical Engineering
Facility/equipment: Facility

Cite this

@inproceedings{a7d49c54ae6b4a2c9cbeaf53ddcd8670,

title = "IR-SWLI for subsurface imaging of large MEMS structures",

keywords = "3D imaging, IR, LED, MEMS, multilayer, non-destructive imaging, scanning white light interferometry, stitching, 3D imaging, IR, LED, MEMS, multilayer, non-destructive imaging, scanning white light interferometry, stitching, 3D imaging, IR, LED, MEMS, multilayer, non-destructive imaging, scanning white light interferometry, stitching",

author = "A. Nolvi and V. Heikkinen and I. Kassamakov and J. Aaltonen and Tuomo Ylitalo and O. Saresoja and M. Berdova and S. Franssila and E. Haeggstrom",

year = "2012",

doi = "10.1117/12.922105",

language = "English",

isbn = "978-0-8194-9122-0",

booktitle = "Optical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012",

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IR-SWLI for subsurface imaging of large MEMS structures. / Nolvi, A.; Heikkinen, V.; Kassamakov, I.; Aaltonen, J.; Ylitalo, Tuomo; Saresoja, O.; Berdova, M.; Franssila, S.; Haeggstrom, E.

Optical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012. 2012.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - IR-SWLI for subsurface imaging of large MEMS structures

AU - Nolvi, A.

AU - Heikkinen, V.

AU - Kassamakov, I.

AU - Aaltonen, J.

AU - Ylitalo, Tuomo

AU - Saresoja, O.

AU - Berdova, M.

AU - Franssila, S.

AU - Haeggstrom, E.

PY - 2012

Y1 - 2012

KW - 3D imaging

KW - IR

KW - LED

KW - MEMS

KW - multilayer

KW - non-destructive imaging

KW - scanning white light interferometry

KW - stitching

KW - 3D imaging

KW - IR

KW - LED

KW - MEMS

KW - multilayer

KW - non-destructive imaging

KW - scanning white light interferometry

KW - stitching

KW - 3D imaging

KW - IR

KW - LED

KW - MEMS

KW - multilayer

KW - non-destructive imaging

KW - scanning white light interferometry

KW - stitching

UR - http://dx.doi.org/10.1117/12.922105

U2 - 10.1117/12.922105

DO - 10.1117/12.922105

M3 - Conference contribution

SN - 978-0-8194-9122-0

BT - Optical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012

ER -

IR-SWLI for subsurface imaging of large MEMS structures

Publication series

Keywords

Access to Document

Raw Materials Research Infrastructure

Cite this