IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, Tuomo Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Haeggstrom

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationOptical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication

Publication series

Name
ISSN (Print)0277-786X

Keywords

  • 3D imaging
  • IR
  • LED
  • MEMS
  • multilayer
  • non-destructive imaging
  • scanning white light interferometry
  • stitching

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