Ion implantation of SrS:Ce thin films

W.-M. Li, M. Ritala, M. Leskelä, R. Lappalainen, M. Karjalainen, E. Soininen, C. Barthou, P. Benalloul, J. Benoit, E. Nykänen, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe Third International Conference on the Science and Technology of Display Phosphors, California, USA, November 3-5, 1997
    Pages109-112
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy
    • ion implantation
    • strontium sulfide
    • thin film

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