Ion beam etching technique in the preparation of samples for cross-sectional microscopy studies of thin films and hard coatings

Research output: Contribution to journalArticle


Research units


Original languageEnglish
Pages (from-to)95-104
JournalSurface and Coatings Technology
Issue number67
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

    Research areas

  • ion beams, stm, thin films

ID: 4946297