Ion beam etching technique in the preparation of samples for cross-sectional microscopy studies of thin films and hard coatings

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Original languageEnglish
Pages (from-to)95-104
JournalSurface and Coatings Technology
Issue number67
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

    Research areas

  • ion beams, stm, thin films

ID: 4946297