Ion beam etching technique in the preparation of samples for cross-sectional microscopy studies of thin films and hard coatings

Kaj Pischow, A.S. Korhonen, M. Adamik, P.B. Barna

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	95-104
Journal	Surface and Coatings Technology
Issue number	67
Publication status	Published - 1994
MoE publication type	A1 Journal article-refereed

Keywords

@article{fa3d014fd17f4ce9854ab5b0702a525e,

title = "Ion beam etching technique in the preparation of samples for cross-sectional microscopy studies of thin films and hard coatings",

keywords = "ion beams, stm, thin films, ion beams, stm, thin films, ion beams, stm, thin films",

author = "Kaj Pischow and A.S. Korhonen and M. Adamik and P.B. Barna",

year = "1994",

language = "English",

pages = "95--104",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier Science",

number = "67",

}

TY - JOUR

T1 - Ion beam etching technique in the preparation of samples for cross-sectional microscopy studies of thin films and hard coatings

AU - Pischow, Kaj

AU - Korhonen, A.S.

AU - Adamik, M.

AU - Barna, P.B.

PY - 1994

Y1 - 1994

KW - ion beams

KW - stm

KW - thin films

KW - ion beams

KW - stm

KW - thin films

KW - ion beams

KW - stm

KW - thin films

M3 - Article

SP - 95

EP - 104

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 67

ER -