Ion beam etching technique in the preparation of samples for cross-sectional microscopy studies of thin films and hard coatings

Kaj Pischow, A.S. Korhonen, M. Adamik, P.B. Barna

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)95-104
    JournalSurface and Coatings Technology
    Issue number67
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ion beams
    • stm
    • thin films

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