@conference{79d1ed4d2918483dac0dc2f318951d31,
title = "(invited talk) Predictive modeling of transition metal gettering",
keywords = "internal gettering, modeling, silicon, transition metals, internal gettering, modeling, silicon, transition metals, internal gettering, modeling, silicon, transition metals",
author = "Anderi Istratov and Peng Zhang and {V{\"a}in{\"o}l{\"a} (Savin)}, Hele and Walter Haber and Eicke Weber",
year = "2003",
language = "English",
note = "International Symposium on Processing Technology and Market Development of 300mm Si Materials ; Conference date: 08-09-2003 Through 09-09-2003",
}