(invited talk) Modeling of boron and phosphorus diffusion gettering of iron in silicon

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	Electrochemical Society Meeting - Honolulu, United States Duration: 7 Oct 2012 → 12 Oct 2012

Conference	Electrochemical Society Meeting
Abbreviated title	ECS
Country/Territory	United States
City	Honolulu
Period	07/10/2012 → 12/10/2012

Cite this

@conference{f8bce3b1b01b4405836b5c57c7696866,

title = "(invited talk) Modeling of boron and phosphorus diffusion gettering of iron in silicon",

author = "Antti Haarahiltunen and Ville V{\"a}h{\"a}nissi and Marko Yli-Koski and Hele Savin",

year = "2012",

language = "English",

note = "Electrochemical Society Meeting, ECS ; Conference date: 07-10-2012 Through 12-10-2012",

}