(invited talk) Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon

Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Kristian Salo, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2018
MoE publication type	Not Eligible
Event	EMRS Spring Meeting - Strasbourg, France Duration: 18 Jun 2018 → 22 Jun 2018

Keywords

@conference{96eca013753b411cb8f45fa2b81b22c5,

title = "(invited talk) Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon",

keywords = "black silicon, etching, nanostructure, phosphorus emitter, RCA clean, standard clean",

author = "Pasanen, {Toni P.} and Hannu Laine and Ville V{\"a}h{\"a}nissi and Kristian Salo and Hele Savin",

year = "2018",

language = "English",

note = "EMRS Spring Meeting ; Conference date: 18-06-2018 Through 22-06-2018",

}

TY - CONF

T1 - (invited talk) Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon

AU - Pasanen, Toni P.

AU - Laine, Hannu

AU - Vähänissi, Ville

AU - Salo, Kristian

AU - Savin, Hele

PY - 2018

Y1 - 2018

KW - black silicon

KW - etching

KW - nanostructure

KW - phosphorus emitter

KW - RCA clean

KW - standard clean

M3 - Abstract

T2 - EMRS Spring Meeting

Y2 - 18 June 2018 through 22 June 2018

ER -