(invited talk) Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry

Hele Savin; Marko Yli-Koski; Antti Haarahiltunen; Heli Talvitie; Juha Sinkkonen

(invited talk) Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry

Hele Savin^*
, Marko Yli-Koski
, Antti Haarahiltunen
, Heli Talvitie
, Juha Sinkkonen

^*Corresponding author for this work

Electron Physics Group (EPG)

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2007
MoE publication type	Not Eligible
Event	Electrochemical Society Meeting - Washington, United States Duration: 7 Oct 2007 → 12 Oct 2007 Conference number: 212

Conference

Conference	Electrochemical Society Meeting
Abbreviated title	ECS
Country/Territory	United States
City	Washington
Period	07/10/2007 → 12/10/2007

Keywords

carrier lifetime
characterization
copper
iron
nickel
silicon

Cite this

@conference{7eb88bbbf9f648b2ac533cfdcb9e763f,

title = "(invited talk) Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry",

keywords = "carrier lifetime, characterization, copper, iron, nickel, silicon, carrier lifetime, characterization, copper, iron, nickel, silicon, carrier lifetime, characterization, copper, iron, nickel, silicon",

author = "Hele Savin and Marko Yli-Koski and Antti Haarahiltunen and Heli Talvitie and Juha Sinkkonen",

year = "2007",

language = "English",

note = "Electrochemical Society Meeting, ECS ; Conference date: 07-10-2007 Through 12-10-2007",

}

TY - CONF

T1 - (invited talk) Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry

AU - Savin, Hele

AU - Yli-Koski, Marko

AU - Haarahiltunen, Antti

AU - Talvitie, Heli

AU - Sinkkonen, Juha

N1 - Conference code: 212

PY - 2007

Y1 - 2007

KW - carrier lifetime

KW - characterization

KW - copper

KW - iron

KW - nickel

KW - silicon

KW - carrier lifetime

KW - characterization

KW - copper

KW - iron

KW - nickel

KW - silicon

KW - carrier lifetime

KW - characterization

KW - copper

KW - iron

KW - nickel

KW - silicon

M3 - Abstract

T2 - Electrochemical Society Meeting

Y2 - 7 October 2007 through 12 October 2007

ER -