(invited talk) Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry

Hele Savin*, Marko Yli-Koski, Antti Haarahiltunen, Heli Talvitie, Juha Sinkkonen

*Corresponding author for this work

Research output: Contribution to conferenceAbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2007
MoE publication typeNot Eligible
EventElectrochemical Society Meeting - Washington, United States
Duration: 7 Oct 200712 Oct 2007
Conference number: 212

Conference

ConferenceElectrochemical Society Meeting
Abbreviated titleECS
Country/TerritoryUnited States
CityWashington
Period07/10/200712/10/2007

Keywords

  • carrier lifetime
  • characterization
  • copper
  • iron
  • nickel
  • silicon

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