Original language | English |
---|---|
Journal | Thin Solid Films |
Volume | 516 |
Publication status | Published - 2008 |
MoE publication type | A1 Journal article-refereed |
Keywords
- alumina
- RIE
- thin films
K. Grigoras, S. Franssila, V-M. Airaksinen
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Journal | Thin Solid Films |
Volume | 516 |
Publication status | Published - 2008 |
MoE publication type | A1 Journal article-refereed |