Investigation of Structural Defects in 4H SiC Wafers

M. Tuominen, R. Yakimova, R.C. Glass, T. Tuomi, E. Janzen

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)729-734
    JournalMaterials Research Society Symposium Proceedings
    Volume339
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • defects
    • silicon carbide
    • synchrotron x-ray topography and diffraction

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