@book{cc2c6c29e745434b8329a98a5f213673,
title = "Introduction to Microfabrication",
keywords = "MEMS, microelectronic engineering, microfabrications, microsystems,, semiconductor processing, VLSI technology, MEMS, microelectronic engineering, microfabrications, microsystems,, semiconductor processing, VLSI technology, MEMS, microelectronic engineering, microfabrications, microsystems,, semiconductor processing, VLSI technology",
author = "Sami Franssila",
year = "2004",
language = "English",
isbn = "0-470-85105-8",
publisher = "Wiley",
address = "United Kingdom",
}