Introduction: basic features and historical development of atomic layer deposition

J. Niinistö, Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Original language	English
Title of host publication	Atomic Layer Deposition of Nanostructured Material
Editors	N. Pinna, M. Knez
Place of Publication	Weinheim
Publisher	WILEY-VCH VERLAG
Edition	11p., 1st ed.
ISBN (Print)	978-3-527-32797-3
Publication status	Published - 2012
MoE publication type	A3 Part of a book or another research book

Cite this

@inbook{5de2f271d6c742708437fd20d5572cf3,

title = "Introduction: basic features and historical development of atomic layer deposition",

author = "J. Niinist{\"o} and Lauri Niinist{\"o}",

year = "2012",

language = "English",

isbn = "978-3-527-32797-3",

editor = "N. Pinna and M. Knez",

booktitle = "Atomic Layer Deposition of Nanostructured Material",

publisher = "WILEY-VCH VERLAG",

address = "Germany",

edition = "11p., 1st ed.",

}