Introduction: basic features and historical development of atomic layer deposition

J. Niinistö, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationAtomic Layer Deposition of Nanostructured Material
    EditorsN. Pinna, M. Knez
    Place of PublicationWeinheim
    Edition11p., 1st ed.
    ISBN (Print)978-3-527-32797-3
    Publication statusPublished - 2012
    MoE publication typeA3 Part of a book or another research book

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