Original language | English |
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Title of host publication | Atomic Layer Deposition of Nanostructured Material |
Editors | N. Pinna, M. Knez |
Place of Publication | Weinheim |
Publisher | Wiley |
Edition | 11p., 1st ed. |
ISBN (Print) | 978-3-527-32797-3 |
Publication status | Published - 2012 |
MoE publication type | A3 Book section, Chapters in research books |
Introduction: basic features and historical development of atomic layer deposition
J. Niinistö, Lauri Niinistö
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review