| Original language | English |
|---|---|
| Title of host publication | Atomic Layer Deposition of Nanostructured Material |
| Editors | N. Pinna, M. Knez |
| Place of Publication | Weinheim |
| Publisher | Wiley |
| Edition | 11p., 1st ed. |
| ISBN (Print) | 978-3-527-32797-3 |
| Publication status | Published - 2012 |
| MoE publication type | A3 Book section, Chapters in research books |
Introduction: basic features and historical development of atomic layer deposition
J. Niinistö, Lauri Niinistö
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review