Interferometric Line Scale Calibrator with a Moving CCD Camera as Line Detector

A. Lassila, E. Ikonen, K. Riski

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publication3rd International IMEKO Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, Heidelberg, Germany, March 21-22, 1994
Place of PublicationGermany
PublisherInternational Measurement Confederation (IMEKO)
Pages105-110
Publication statusPublished - 1994
MoE publication typeA4 Article in a conference publication

Keywords

  • interferometry
  • length metrology
  • line scales

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