Interferometric determination of mechanical susceptibility of a silicon oscillator

O. Hahtela, K. Lahti, K. Nera, E. Vahala, I. Tittonen

Research output: Working paperProfessional

Original languageEnglish
Pagess. P6
Publication statusPublished - 2001
MoE publication typeD4 Published development or research report or study

Publication series

NameOptics Days 2001, Tampere, Finland, April 20-21, 2001

Keywords

  • Fabry-Perot interferometer
  • mechanical susceptibility
  • micromechanical oscillator
  • optical measurement

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