Interferometer for calibration of graduated line scales with a moving CCD camera as a line detector

A. Lassila, E. Ikonen, K. Riski

    Research output: Contribution to journalArticleScientificpeer-review

    30 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)3600-3603
    JournalApplied Optics
    Issue number16
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed


    • length metrology, line scales, interferometry

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