Original language | English |
---|---|
Pages (from-to) | 3600-3603 |
Journal | Applied Optics |
Volume | 33 |
Issue number | 16 |
Publication status | Published - 1994 |
MoE publication type | A1 Journal article-refereed |
Keywords
- length metrology, line scales, interferometry
A. Lassila, E. Ikonen, K. Riski
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 3600-3603 |
Journal | Applied Optics |
Volume | 33 |
Issue number | 16 |
Publication status | Published - 1994 |
MoE publication type | A1 Journal article-refereed |