Interferometer for calibration of graduated line scales with a moving CCD camera as a line detector

A. Lassila, E. Ikonen, K. Riski

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)
Original languageEnglish
Pages (from-to)3600-3603
JournalApplied Optics
Volume33
Issue number16
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

Keywords

  • length metrology, line scales, interferometry

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