Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres

Jussi Lyytinen, Maria Berdova, Petri Hirvonen, Xuwen Liu, Sami Franssila, Quan Zhou, Jari Koskinen

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)37320-37328
Number of pages9
JournalRSC Advances
Volume4
Issue number70
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Keywords

  • adhesion
  • Al2O3
  • atomic layer deposition (ALD)
  • cohesion
  • embedded microspheres
  • interfacial fracture
  • interfacial mechanical testing
  • interfacial strength
  • TiO2

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