Integration of GaAs-based light emitter with poly-SOI

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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Original languageEnglish
Title of host publicationThe 4th International Conference on Materials for Microelectronics and Nanoengineering ICMMN-4, Espoo, Finland, 10-12 June, 2002
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication

    Research areas

  • semiconductors, synchrotron x-ray topography

ID: 4141332