Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). / Autere, Anton; Karvonen, Lasse; Säynätjoki, Antti; Roussey, Matthieu; Rönn, John; Färm, Elina; Kemell, Marianna; Tu, Xiaoguang; Liow, Tsung-Yang; Lo, Patrick; Ritala, Mikko; Leskelä, Markku; Lipsanen, Harri; Honkanen, Seppo; Sun, Zhipei.

SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. ed. / L Vivien; L Pavesi; S Pelli. SPIE - The International Society for Optical Engineering, 2016. UNSP 98910J (Proceedings of SPIE; Vol. 9891).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Harvard

Autere, A, Karvonen, L, Säynätjoki, A, Roussey, M, Rönn, J, Färm, E, Kemell, M, Tu, X, Liow, T-Y, Lo, P, Ritala, M, Leskelä, M, Lipsanen, H, Honkanen, S & Sun, Z 2016, Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). in L Vivien, L Pavesi & S Pelli (eds), SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V., UNSP 98910J, Proceedings of SPIE, vol. 9891, SPIE - The International Society for Optical Engineering, SPIE Photonics Europe, Brussels, Belgium, 03/04/2016. https://doi.org/10.1117/12.2227097

APA

Autere, A., Karvonen, L., Säynätjoki, A., Roussey, M., Rönn, J., Färm, E., ... Sun, Z. (2016). Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). In L. Vivien, L. Pavesi, & S. Pelli (Eds.), SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V [UNSP 98910J] (Proceedings of SPIE; Vol. 9891). SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.2227097

Vancouver

Autere A, Karvonen L, Säynätjoki A, Roussey M, Rönn J, Färm E et al. Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). In Vivien L, Pavesi L, Pelli S, editors, SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. SPIE - The International Society for Optical Engineering. 2016. UNSP 98910J. (Proceedings of SPIE). https://doi.org/10.1117/12.2227097

Author

Autere, Anton ; Karvonen, Lasse ; Säynätjoki, Antti ; Roussey, Matthieu ; Rönn, John ; Färm, Elina ; Kemell, Marianna ; Tu, Xiaoguang ; Liow, Tsung-Yang ; Lo, Patrick ; Ritala, Mikko ; Leskelä, Markku ; Lipsanen, Harri ; Honkanen, Seppo ; Sun, Zhipei. / Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. editor / L Vivien ; L Pavesi ; S Pelli. SPIE - The International Society for Optical Engineering, 2016. (Proceedings of SPIE).

Bibtex - Download

@inproceedings{04ff1449b33c4664a547da05704a967c,
title = "Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)",
author = "Anton Autere and Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Matthieu Roussey and John R{\"o}nn and Elina F{\"a}rm and Marianna Kemell and Xiaoguang Tu and Tsung-Yang Liow and Patrick Lo and Mikko Ritala and Markku Leskel{\"a} and Harri Lipsanen and Seppo Honkanen and Zhipei Sun",
year = "2016",
doi = "10.1117/12.2227097",
language = "English",
isbn = "9781510601369",
series = "Proceedings of SPIE",
publisher = "SPIE - The International Society for Optical Engineering",
editor = "L Vivien and L Pavesi and S Pelli",
booktitle = "SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V",

}

RIS - Download

TY - GEN

T1 - Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

AU - Autere, Anton

AU - Karvonen, Lasse

AU - Säynätjoki, Antti

AU - Roussey, Matthieu

AU - Rönn, John

AU - Färm, Elina

AU - Kemell, Marianna

AU - Tu, Xiaoguang

AU - Liow, Tsung-Yang

AU - Lo, Patrick

AU - Ritala, Mikko

AU - Leskelä, Markku

AU - Lipsanen, Harri

AU - Honkanen, Seppo

AU - Sun, Zhipei

PY - 2016

Y1 - 2016

U2 - 10.1117/12.2227097

DO - 10.1117/12.2227097

M3 - Conference contribution

SN - 9781510601369

T3 - Proceedings of SPIE

BT - SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V

A2 - Vivien, L

A2 - Pavesi, L

A2 - Pelli, S

PB - SPIE - The International Society for Optical Engineering

ER -

ID: 10713791