Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Researchers

  • Anton Autere
  • Lasse Karvonen
  • Antti Säynätjoki
  • Matthieu Roussey
  • John-Olof Rönn

  • Elina Färm
  • Marianna Kemell
  • Xiaoguang Tu
  • Tsung-Yang Liow
  • Patrick Lo
  • Mikko Ritala
  • Markku Leskelä
  • Harri Lipsanen

  • Seppo Honkanen
  • Zhipei Sun

Research units

  • University of Eastern Finland
  • University of Helsinki
  • Agency for Science, Technology and Research (A*STAR)

Details

Original languageEnglish
Title of host publicationSILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V
EditorsL Vivien, L Pavesi, S Pelli
Publication statusPublished - 2016
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics Europe - Brussels, Belgium
Duration: 3 Apr 20167 Apr 2016

Publication series

NameProceedings of SPIE
PublisherSPIE-INT SOC OPTICAL ENGINEERING
Volume9891
ISSN (Print)0277-786X

Conference

ConferenceSPIE Photonics Europe
CountryBelgium
CityBrussels
Period03/04/201607/04/2016

ID: 10713791