Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

Anton Autere; Lasse Karvonen; Antti Säynätjoki; Matthieu Roussey; John Rönn; Elina Färm; Marianna Kemell; Xiaoguang Tu; Tsung-Yang Liow; Patrick Lo; Mikko Ritala; Markku Leskelä; Harri Lipsanen; Seppo Honkanen; Zhipei Sun

doi:10.1117/12.2227097

Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

Anton Autere^*
, Lasse Karvonen
, Antti Säynätjoki
, Matthieu Roussey
, John Rönn
, Elina Färm
, Marianna Kemell
, Xiaoguang Tu
, Tsung-Yang Liow
, Patrick Lo
, Mikko Ritala
, Markku Leskelä
, Harri Lipsanen
, Seppo Honkanen
, Zhipei Sun

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V
Editors	L Vivien, L Pavesi, S Pelli
Publisher	SPIE
Number of pages	2
ISBN (Print)	9781510601369
DOIs	https://doi.org/10.1117/12.2227097
Publication status	Published - 2016
MoE publication type	A4 Conference publication
Event	SPIE Photonics Europe - Brussels, Belgium Duration: 3 Apr 2016 → 7 Apr 2016

Publication series

Name	Proceedings of SPIE
Publisher	SPIE-INT SOC OPTICAL ENGINEERING
Volume	9891
ISSN (Print)	0277-786X

Conference

Conference	SPIE Photonics Europe
Country/Territory	Belgium
City	Brussels
Period	03/04/2016 → 07/04/2016

Access to Document

10.1117/12.2227097

Cite this

Autere, A., Karvonen, L., Säynätjoki, A., Roussey, M., Rönn, J., Färm, E., Kemell, M., Tu, X., Liow, T.-Y., Lo, P., Ritala, M., Leskelä, M., Lipsanen, H., Honkanen, S., & Sun, Z. (2016). Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). In L. Vivien, L. Pavesi, & S. Pelli (Eds.), SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V Article UNSP 98910J (Proceedings of SPIE; Vol. 9891). SPIE. https://doi.org/10.1117/12.2227097

@inproceedings{04ff1449b33c4664a547da05704a967c,

title = "Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)",

author = "Anton Autere and Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Matthieu Roussey and John R{\"o}nn and Elina F{\"a}rm and Marianna Kemell and Xiaoguang Tu and Tsung-Yang Liow and Patrick Lo and Mikko Ritala and Markku Leskel{\"a} and Harri Lipsanen and Seppo Honkanen and Zhipei Sun",

year = "2016",

doi = "10.1117/12.2227097",

language = "English",

isbn = "9781510601369 ",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "L Vivien and L Pavesi and S Pelli",

booktitle = "SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V",

address = "United States",

note = "SPIE Photonics Europe ; Conference date: 03-04-2016 Through 07-04-2016",

}

Autere, A, Karvonen, L, Säynätjoki, A, Roussey, M, Rönn, J, Färm, E, Kemell, M, Tu, X, Liow, T-Y, Lo, P, Ritala, M, Leskelä, M, Lipsanen, H, Honkanen, S & Sun, Z 2016, Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). in L Vivien, L Pavesi & S Pelli (eds), SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V., UNSP 98910J, Proceedings of SPIE, vol. 9891, SPIE, SPIE Photonics Europe, Brussels, Belgium, 03/04/2016. https://doi.org/10.1117/12.2227097

Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation). / Autere, Anton; Karvonen, Lasse; Säynätjoki, Antti et al.
SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. ed. / L Vivien; L Pavesi; S Pelli. SPIE, 2016. UNSP 98910J (Proceedings of SPIE; Vol. 9891).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation)

AU - Autere, Anton

AU - Karvonen, Lasse

AU - Säynätjoki, Antti

AU - Roussey, Matthieu

AU - Rönn, John

AU - Färm, Elina

AU - Kemell, Marianna

AU - Tu, Xiaoguang

AU - Liow, Tsung-Yang

AU - Lo, Patrick

AU - Ritala, Mikko

AU - Leskelä, Markku

AU - Lipsanen, Harri

AU - Honkanen, Seppo

AU - Sun, Zhipei

PY - 2016

Y1 - 2016

U2 - 10.1117/12.2227097

DO - 10.1117/12.2227097

M3 - Conference article in proceedings

SN - 9781510601369

T3 - Proceedings of SPIE

BT - SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V

A2 - Vivien, L

A2 - Pavesi, L

A2 - Pelli, S

PB - SPIE

T2 - SPIE Photonics Europe

Y2 - 3 April 2016 through 7 April 2016

ER -