Inorganic-organic superlattice thin films by atomic/molecular layer deposition

Tommi Tynell, Maarit Karppinen

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    1 Citation (Scopus)
    281 Downloads (Pure)
    Original languageEnglish
    Title of host publicationOxide Thin Films, Multilayers, and Nanocomposites, Part III
    EditorsS.Arisawa P.Mele, T.Tsuchiya C.Li
    ISBN (Electronic)978-3-319-14478-8
    Publication statusPublished - 2015
    MoE publication typeA3 Part of a book or another research book

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