Inhibition of Silica Nanoparticle Adhesion to Poly(vinyl alcohol) Surfaces by Ammonia-Mediated Hydration: Implications for Effective Post-Chemical-Mechanical Planarization Cleaning

Takahiko Ikarashi, Takumi Yoshino, Naoki Nakajima, Kazuki Miyata, Keisuke Miyazawa, Ygor Morais Jaques, Adam S. Foster, Megumi Uno, Chikako Takatoh, Takeshi Fukuma*

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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Chemistry

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