Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition

A.R.Ananda Sagari, J. Malm, Mikko I. Laitinen, P. Rahkila, M. Hongqiang, M. Putkonen, M. Karppinen, H.J. Whitlow, T. Sajavaara

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)26-31
    JournalThin Solid Films
    Volume531
    Issue numberxx
    DOIs
    Publication statusPublished - 2013
    MoE publication typeA1 Journal article-refereed

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