@article{cfd98fbcad74491c9cf9a0dd8d9475ed,
title = "Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators",
keywords = "aluminium nitride sputtering, nickel, piezoelectric effect crystallization, surface morphology molybdenum, titanium, aluminium nitride sputtering, nickel, piezoelectric effect crystallization, surface morphology molybdenum, titanium, aluminium nitride sputtering, nickel, piezoelectric effect crystallization, surface morphology molybdenum, titanium",
author = "T. Riekkinen and A. Nurmela and J. Molarius and T. Pensala and P. Kostamo and M. Ylilammi and {van Dijken}, S.",
year = "2009",
doi = "10.1016/j.tsf.2009.04.060",
language = "English",
volume = "517",
pages = "6588--6592",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "24",
}