Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

T. Riekkinen, A. Nurmela, J. Molarius, T. Pensala, P. Kostamo, M. Ylilammi, S. van Dijken

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)6588-6592
Number of pages5
JournalThin Solid Films
Volume517
Issue number24
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

Keywords

  • aluminium nitride sputtering
  • nickel
  • piezoelectric effect crystallization
  • surface morphology molybdenum
  • titanium

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