Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100 °c for moisture barrier applications

Zhen Zhu, Perttu Sippola, Harri Lipsanen, Hele Savin, Saoussen Merdes

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)
161 Downloads (Pure)

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