@article{4f324dfe9c3c47a88ead0f6da739bd91,
title = "Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition",
author = "\{Pyymaki Perros\}, Alexander and Hanna Hakola and Timo Sajavaara and Teppo Huhtio and Harri Lipsanen",
year = "2013",
doi = "10.1088/0022-3727/46/50/505502",
language = "English",
volume = "46",
pages = "1--8",
journal = "Journal of Physics D: Applied Physics",
issn = "0022-3727",
publisher = "Institute of Physics Publishing",
number = "50",
}