Industrial ALD Equipment for PV and OLED Applications

Matti Putkonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Original languageEnglish
    Title of host publicationAVS-58 symposium, Nashville, TN, USA , October 30- November 4, 2011
    Publication statusPublished - 2011
    MoE publication typeB3 Non-refereed article in conference proceedings

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