| Original language | English |
|---|---|
| Title of host publication | AVS-58 symposium, Nashville, TN, USA , October 30- November 4, 2011 |
| Publication status | Published - 2011 |
| MoE publication type | B3 Non-refereed article in conference proceedings |
Industrial ALD Equipment for PV and OLED Applications
Matti Putkonen
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific