Inductively coupled plasma etching of III-nitride based laser structure using CI2/BCI3/Ar gasses

Pekka Törmä, Olli Svensk, Sami Suihkonen, Harri Lipsanen, V.E. Odnoblyudov, V.E. Bougrov

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2006
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameWBSQ Symposium, Ascona, Sveitsi, 2006

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