Indium phosphide nanopillar growth by hydride vapour phase epitaxy

F. Olsson, A. Berrier, T. Hakkarainen, S. Anand, S. Lourdudoss

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2007
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name17th International Vacuum Congress, 2.-6.7.2007, Tukholma, Ruotsi

    Keywords

    • hydride vapour phase epitaxy
    • nanopillar

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