@inproceedings{430f79b25aea4bdfa9ca6ac06154b31e,
title = "Indentation Load Relaxation Studies of Thin Film-Substrate Systems",
abstract = "Results from indentation load relaxation (ILR) tests on thin film-substrate systems are reported. In the case of a 1 pum aluminum film on silicon, the data can be interpreted as reflecting both the properties of the film and the interface between film and substrate. Data from a 37μm TiN film on 304 SS are believed to reflect the combined behavior of the film and substrate.",
author = "Donald Stone and W. LaFontaine and S. Ruoff and Simo-Pekka Hannula and B. Yost and Li, \{Che Yu\}",
year = "1986",
doi = "10.1557/PROC-72-127",
language = "English",
volume = "72",
series = "MRS Proceedings",
pages = "127--131",
booktitle = "MRS Proceedings. Symposium G – Electronic Packaging Materials",
note = "Materials Research Society Spring Meeting, MRS ; Conference date: 01-01-1986 Through 01-01-1986",
}