In situ reflectance monitoring of thick GaAsN layers

Outi Reentilä; Aapo Lankinen; Antti Säynätjoki; Marco Mattila; Turkka Tuomi; Harri Lipsanen; Lisa "O'Reilly"; P.J. McNally

In situ reflectance monitoring of thick GaAsN layers

Outi Reentilä, Aapo Lankinen, Antti Säynätjoki, Marco Mattila, Turkka Tuomi, Harri Lipsanen, Lisa "O'Reilly", P.J. McNally

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	The 6th International Conference on Materials for Microelectronics & Nanoengineering MFMN, 27-29.10.2006, Cranfield, UK
Pages	29-32
Publication status	Published - 2006
MoE publication type	A4 Article in a conference publication

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title = "In situ reflectance monitoring of thick GaAsN layers",

author = "Outi Reentil{\"a} and Aapo Lankinen and Antti S{\"a}yn{\"a}tjoki and Marco Mattila and Turkka Tuomi and Harri Lipsanen and Lisa {"}O'Reilly{"} and P.J. McNally",

year = "2006",

language = "English",

pages = "29--32",

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In situ reflectance monitoring of thick GaAsN layers. / Reentilä, Outi; Lankinen, Aapo; Säynätjoki, Antti et al.

The 6th International Conference on Materials for Microelectronics & Nanoengineering MFMN, 27-29.10.2006, Cranfield, UK. 2006. p. 29-32.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - In situ reflectance monitoring of thick GaAsN layers

AU - Reentilä, Outi

AU - Lankinen, Aapo

AU - Säynätjoki, Antti

AU - Mattila, Marco

AU - Tuomi, Turkka

AU - Lipsanen, Harri

AU - "O'Reilly", Lisa

AU - McNally, P.J.

PY - 2006

Y1 - 2006

M3 - Conference contribution

SP - 29

EP - 32

BT - The 6th International Conference on Materials for Microelectronics & Nanoengineering MFMN, 27-29.10.2006, Cranfield, UK

ER -