Original language | English |
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Title of host publication | The 6th International Conference on Materials for Microelectronics & Nanoengineering MFMN, 27-29.10.2006, Cranfield, UK |
Pages | 29-32 |
Publication status | Published - 2006 |
MoE publication type | A4 Article in a conference publication |
In situ reflectance monitoring of thick GaAsN layers
Outi Reentilä, Aapo Lankinen, Antti Säynätjoki, Marco Mattila, Turkka Tuomi, Harri Lipsanen, Lisa "O'Reilly", P.J. McNally
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review