In situ reflectance monitoring of thick GaAsN layers

Outi Reentilä, Aapo Lankinen, Antti Säynätjoki, Marco Mattila, Turkka Tuomi, Harri Lipsanen, Lisa "O'Reilly", P.J. McNally

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 6th International Conference on Materials for Microelectronics & Nanoengineering MFMN, 27-29.10.2006, Cranfield, UK
    Pages29-32
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

    Cite this

    Reentilä, O., Lankinen, A., Säynätjoki, A., Mattila, M., Tuomi, T., Lipsanen, H., "O'Reilly", L., & McNally, P. J. (2006). In situ reflectance monitoring of thick GaAsN layers. In The 6th International Conference on Materials for Microelectronics & Nanoengineering MFMN, 27-29.10.2006, Cranfield, UK (pp. 29-32)