In Situ Atomic/Molecular Layer-by-Layer Deposition of Inorganic-Organic Coordination Network Thin Films from Gaseous Precursors

Esko Ahvenniemi, Maarit Karppinen*

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    31 Citations (Scopus)
    161 Downloads (Pure)

    Abstract

    Crystalline inorganic-organic coordination network materials possess a property palette highly attractive for a number of frontier applications. In many prospective applications of these materials, high-quality thin films would be required. Gas-phase thin-film techniques could potentially provide a number of advantages over the current liquid-phase techniques for depositing such state-of-the-art hybrid thin films. The strongly emerging atomic/molecular layer deposition (ALD/MLD) technique in particular enables the rational fabrication of inorganic-organic thin films in a digital atomic/molecular layer-by-layer manner through successive gas-to-surface reactions of inorganic and organic precursors, but the resultant films have been amorphous. Here, we demonstrate the in situ ALD/MLD growth of well-crystalline calcium terephthalate (Ca-TP) coordination network thin films in a wide deposition temperature range. We moreover investigate the water absorption/desorption characteristics of the films and report attractive mechanical properties for both the dry and water-intercalated films.

    Original languageEnglish
    Pages (from-to)6260-6265
    Number of pages6
    JournalChemistry of Materials
    Volume28
    Issue number17
    DOIs
    Publication statusPublished - 13 Sep 2016
    MoE publication typeA1 Journal article-refereed

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    Molecular-Layer-Engineered Inorganic-Organic Hybrid Materials

    Hagen, D., Khayyami, A., Marin, G., Ghazy, A., Nisula, M., Johansson, L., Safdar, M., Krahl, F., Thomas, C., Medina, E., Tiittanen, T., Giedraityte, Z., Heiska, J., Lepikko, S., Karppinen, M., Haggren, A., Tripathi, T., Penttinen, J., Philip, A., Srivastava, D., Aleksandrova, I., Mustonen, O. & Jin, H.

    23/12/201324/05/2019

    Project: EU: ERC grants

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