Improved SERS Intensity from Silver Coated Black Silicon by Tuning Surface Plasmons

Ya Chen, Guogang Kang, Ali Shah, Ville Pale, Ying Tian, Zhipei Sun, Ilkka Tittonen, Seppo Honkanen, Harri Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)


An economical method of fabricating large-area (up to a 100-mm wafer) silver (Ag)-coated black silicon (BS) substrates is demonstrated by cryogenic deep reactive ion etching with inductively coupled plasma. This method enables a simple adjustment of the spike structure (e.g., height, width, sidewall slope and density of the spikes) on the silicon substrate, which thus offers the advantages of accurate tuning the density and amplitude of the localized surface plasmons after Ag coating. Using this method, an enhancement factor of 109 is achieved for the probe molecule of rhodamine 6G (around two orders of magnitude higher than previous results based on Ag-coated BS) in surface-enhanced Raman scattering (SERS) measurement. The presented results pave the way to make Ag-coated BS substrates as economic and large-area platforms for diverse surface plasmon related applications (such as SERS and surface plasmon based biosensors).
Original languageEnglish
Article number1300008
Number of pages9
JournalAdvanced Materials Interfaces
Issue number1
Publication statusPublished - 13 Feb 2014
MoE publication typeA1 Journal article-refereed


  • biosensors
  • black silicon
  • silver
  • surface enhanced Raman scattering
  • surface plasmons

Fingerprint Dive into the research topics of 'Improved SERS Intensity from Silver Coated Black Silicon by Tuning Surface Plasmons'. Together they form a unique fingerprint.

Cite this