Original language | English |
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Publication status | Published - 2011 |
MoE publication type | D4 Published development or research report or study |
Improved performance of silicon photonic devices with atomic layer deposited thin films
Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen
Research output: Working paper › Professional