Improved performance of silicon photonic devices with atomic layer deposited thin films

Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2011
    MoE publication typeD4 Published development or research report or study

    Cite this