| Original language | English |
|---|---|
| Publication status | Published - 2011 |
| MoE publication type | D4 Published development or research report or study |
Improved performance of silicon photonic devices with atomic layer deposited thin films
Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen
Research output: Working paper › Professional