Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion

Tsun Hang Fung, Toni Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, David Payne, Hele Savin, Malcolm Abbott

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)
20 Downloads (Pure)

Search results