Implantation Defects and n-type Doping in Ge and Ge rich SiGe

A.R. Peaker, V.P. Markevich, B. Hamilton, I.D. Hawkins, J. Slotte, K. Kuitunen, F. Tuomisto, A. Satta, E. Simoen, N. Abrosimov

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)152-154
Number of pages3
JournalThin Solid Films
Volume517
Issue number1
DOIs
Publication statusPublished - 3 Nov 2008
MoE publication typeA1 Journal article-refereed

Keywords

  • Ge
  • SiGe
  • vacancy defects

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