Abstract
In the simulation based research of aggressively scaled CMOS transistors, it is mandatoryto combine advanced transport simulators and quantum confinement effects with atomistic simulations which accurately reproduce the electronic structure at the nanometer scale. This work investigates the impact of cross-section dependent effective masses, obtained from atomistic simulations, on the mobility in Si nanowire transistors (NWTs). For the transport simulations, weuse the Kubo-Greenwood formalism with a set of multisubband phonon, surface roughness, and impurity scattering mechanisms.
Original language | English |
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Title of host publication | SISPAD 2018 - 2018 International Conference on Simulation of Semiconductor Processes and Devices, Proceedings |
Publisher | IEEE |
Pages | 297-300 |
Number of pages | 4 |
Volume | 2018-September |
ISBN (Electronic) | 9781538667880 |
DOIs | |
Publication status | Published - 28 Nov 2018 |
MoE publication type | A4 Article in a conference publication |
Event | International Conference on Simulation of Semiconductor Processes and Devices - Austin, United States Duration: 24 Sep 2018 → 26 Sep 2018 |
Conference
Conference | International Conference on Simulation of Semiconductor Processes and Devices |
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Abbreviated title | SISPAD |
Country/Territory | United States |
City | Austin |
Period | 24/09/2018 → 26/09/2018 |
Keywords
- Impurity Scattering
- KuboGreenwood Formalism
- Matthiessen rule
- Nanowire FETs
- Phonon Scattering
- Surface Roughness Scattering
- Transport Effective Mass