Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide

Jennifer Ott, Toni P. Pasanen, Akiko Gädda, Moises Garín, Kawa Rosta, Ville Vähänissi, Hele Savin

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

17 Downloads (Pure)

2 results

Filter

Finished
PREIN: Photonics Research and Innovation
Mäkelä, K.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding
-: Photonics Research and Innovation
Savin, H., Ayedh, H., Mulbagal Rajanna, P., Rauha, I., Liu, H. & Vähänissi, V.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding