Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide

Search results

• Finished

  -: Photonics Research and Innovation

  Savin, H., Ayedh, H., Mulbagal Rajanna, P., Rauha, I., Liu, H. & Vähänissi, V.

  01/01/2019 → 31/12/2022

  Project: Academy of Finland: Other research funding

  • Silicon 100%
  • Aluminum Oxide 60%
  • Devices 46%
  • Solar Cell 43%
  • Photons 43%

• PREIN: Photonics Research and Innovation

  Mäkelä, K.

  01/01/2019 → 31/12/2022

  Project: Academy of Finland: Other research funding

  • Silicon 100%
  • Devices 90%
  • Light 87%
  • Material 85%
  • Surface 82%