Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide

Jennifer Ott, Toni P. Pasanen, Akiko Gädda, Moises Garín, Kawa Rosta, Ville Vähänissi, Hele Savin

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)
19 Downloads (Pure)

Search results