Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths

Research output: Contribution to journalArticleScientificpeer-review

Standard

Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths. / Khanna, Amit; Subramanian, Ananth; Häyrinen, Markus; Selvaraja, Shankar; Verheyen, Peter; Van Thourhout, Dries; Honkanen, Seppo; Lipsanen, Harri; Baets, Roel.

In: Optics Express, Vol. 22, No. 5, 2014, p. 5684-5692.

Research output: Contribution to journalArticleScientificpeer-review

Harvard

Khanna, A, Subramanian, A, Häyrinen, M, Selvaraja, S, Verheyen, P, Van Thourhout, D, Honkanen, S, Lipsanen, H & Baets, R 2014, 'Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths' Optics Express, vol. 22, no. 5, pp. 5684-5692. https://doi.org/10.1364/OE.22.005684

APA

Khanna, A., Subramanian, A., Häyrinen, M., Selvaraja, S., Verheyen, P., Van Thourhout, D., ... Baets, R. (2014). Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths. Optics Express, 22(5), 5684-5692. https://doi.org/10.1364/OE.22.005684

Vancouver

Author

Khanna, Amit ; Subramanian, Ananth ; Häyrinen, Markus ; Selvaraja, Shankar ; Verheyen, Peter ; Van Thourhout, Dries ; Honkanen, Seppo ; Lipsanen, Harri ; Baets, Roel. / Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths. In: Optics Express. 2014 ; Vol. 22, No. 5. pp. 5684-5692.

Bibtex - Download

@article{28712a8f22db4f028ffe81f061196a5c,
title = "Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths",
author = "Amit Khanna and Ananth Subramanian and Markus H{\"a}yrinen and Shankar Selvaraja and Peter Verheyen and {Van Thourhout}, Dries and Seppo Honkanen and Harri Lipsanen and Roel Baets",
year = "2014",
doi = "10.1364/OE.22.005684",
language = "English",
volume = "22",
pages = "5684--5692",
journal = "Optics Express",
issn = "1094-4087",
number = "5",

}

RIS - Download

TY - JOUR

T1 - Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths

AU - Khanna, Amit

AU - Subramanian, Ananth

AU - Häyrinen, Markus

AU - Selvaraja, Shankar

AU - Verheyen, Peter

AU - Van Thourhout, Dries

AU - Honkanen, Seppo

AU - Lipsanen, Harri

AU - Baets, Roel

PY - 2014

Y1 - 2014

UR - http://dx.doi.org/10.1364/OE.22.005684

U2 - 10.1364/OE.22.005684

DO - 10.1364/OE.22.005684

M3 - Article

VL - 22

SP - 5684

EP - 5692

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 5

ER -

ID: 757572