Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths

Research output: Contribution to journalArticleScientificpeer-review


  • Amit Khanna
  • Ananth Subramanian
  • Markus Häyrinen
  • Shankar Selvaraja
  • Peter Verheyen
  • Dries Van Thourhout
  • Seppo Honkanen
  • Harri Lipsanen

  • Roel Baets

Research units

  • Ghent University
  • University of Eastern Finland
  • Interuniversitair Micro-Elektronica Centrum


Original languageEnglish
Pages (from-to)5684-5692
Number of pages9
JournalOptics Express
Issue number5
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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