Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths
Amit Khanna, Ananth Subramanian, Markus Häyrinen, Shankar Selvaraja, Peter Verheyen, Dries Van Thourhout, Seppo Honkanen, Harri Lipsanen, Roel Baets
Research output: Contribution to journal › Article › Scientific › peer-review