Original language | English |
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Pages (from-to) | 5684-5692 |
Number of pages | 9 |
Journal | Optics Express |
Volume | 22 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths
Amit Khanna, Ananth Subramanian, Markus Häyrinen, Shankar Selvaraja, Peter Verheyen, Dries Van Thourhout, Seppo Honkanen, Harri Lipsanen, Roel Baets
Research output: Contribution to journal › Article › Scientific › peer-review
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