Impact of ALD grown passivation layers on silicon nitride based integrated optical devices for very-near-infrared wavelengths

Amit Khanna, Ananth Subramanian, Markus Häyrinen, Shankar Selvaraja, Peter Verheyen, Dries Van Thourhout, Seppo Honkanen, Harri Lipsanen, Roel Baets

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
203 Downloads (Pure)
Original languageEnglish
Pages (from-to)5684-5692
Number of pages9
JournalOptics Express
Volume22
Issue number5
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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